Open datasets from HCAI research projects
The Carinthia-S dataset is an enhanced version of the original publicly available Carinthia dataset, augmented with expert-validated binary segmentation masks for each defect image. It contains Scanning Electron Microscope (SEM) images of defects observed on a single production layer of unstructured semiconductor wafers, along with their corresponding segmentation masks. The dataset comprises 4,591 images, each paired with a segmentation mask, unevenly distributed across six defect classes. The dataset's description is available in the 'carinthia-s_dataset.html' file, and the images themselves can be found in the 'data.zip' file.
The dataset was collected between 2021 and 2023 from 16 process chambers across six PVD machines at Infineon Technologies AG. It comprises 3,598 procedures, each representing a single sample. 104 input features describe equipment and process conditions derived from aggregated sensor traces (Advanced Process Control data). The output space consists of 17 target variables corresponding to thickness measurements at spatially distributed wafer points (Statistical Process Control data). The dataset supports both single-output and vector-valued learning tasks for modelling physical layer properties in semiconductor manufacturing.